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Ulvac Technologies, Inc.
Ulvac Technologies, Inc. is a designer and manufacturer of equipment and materials for industrial applications of vacuum technology. Product offers include vacuum valves, cryo pumps, cryo coolers and vacuum pumps as well as vacuum and gas measurement equipment.
Company Info
- Website
- ulvac.com
- Phone
- 978-686-7550, 800-998-5822
- Fax
- 978-689-6301
- Address
-
401 Griffin Brook Dr.
Methuen, MA 01844
Entries
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in Diaphragm Vacuum Pumps
ULVAC Technologies manufactures several styles of diaphragm pumps. Rubber reciprocating, dry diaphragm pumps are available in three models (DAL-5S, DAP-D, and DAP-12S). Both single- and double-stage versions are available, with pumping capacities ranging from 5 l/min to 14 l/min for wide range of applications, including vacuum chucks, vacuum tweezers, and automatic packing machines. The DA Series includes the DA-20D, DA-60S, and DA121D, each with a built-in thermal protector and pumping speeds up to 24, 72 and 145 l/min at 60 Hz. Finally, the chemical-type DTC Series is made with PTFE components for pumping corrosive gases and organic solvents, such as those found in evaporating systems, exhausts of gas transfer tubes, and laser-gas circulation. Top pumping speeds for the DTC-21, DTC-60, and DTC-120 are 24, 70, and 140 l/min, respectively.
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in Dry/Oilless Vacuum Pumps
ULVAC Technologies sells several series of dry pumps, including scroll pumps, diaphragm pumps, and rocking piston pumps. With pumping speeds from 47 to 1,050 CFM, the LR Series (uniformity of low temperature distribution) and HR Series (uniformity of high temperature distribution) effectively use compressed heat to create durability even under strenuous processes like CVD, etching, etc. The ER Series, with pumping speeds of 47 to 670 CFM, is an energy-efficient unit ideal for LPCVD and other environments that require corrosion resistance. Next, with 3.8 to 18 CFM, the DIS/DVS/DISL Series scroll dry vacuum pumps can be applied in vacuum drying systems, helium leak detectors, and adsorption and transport systems. Three series of diaphragm pumps, and one series of rocking piston pump, are also available.
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in Miniature Vacuum Pumps
ULVAC Technologies Inc. designs and manufactures miniature belt-driven rotary pumps and miniature direct drive rotary pumps. The belt-driven pumps feature pumping speeds of 56.5-247 CFM, 6.5-13 CFM, and 11-34 CFM. The direct drive pumps feature pumping speeds ranging from 6 CFM to 336 CFM.
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in Rotary Pumps
Ulvac is an international corporation that designs, manufacturers and markets rotary vane pumps in belt driven and direct drive configurations. Belt driven rotary pumps offer pumping speeds from 6.5 up to 247 CFM, while direct drive designs feature pumping speeds of 6 up to 336 CFM.
View Ulvac's Complete Line of Rotary Pumps
- PKS Series: Large oil rotary vacuum pumps
- PVD Series: Belt-driven compact rotary vacuum pumps
- VD Series: Rotary vacuum pumps (Oil)
- VS Series: Rotary vacuum pumps with direct-coupled motors (Oil)
- Rotary Pump Accessories
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in Rotary Vane Vacuum Pumps
ULVAC Technologies offers a host of different rotary vane vacuum pumps, from belt-driven units to direct-driven. The PKS, PVD, and DK Series pumps are all belt-driven, and feature pumping speed ranges of 56.5 to 247 CFM, 6.5 to 13 CFM, and 11 to 34 CFM. There are nine direct drive options, including the VD Series (21-28 CFM), D-DK (11-33 CFM), EC (28-57 CFM), VS (106-170 CFM), G (6-120 LPM), GHD (30-144 LPM), GVD/GLS/GLD (60 LPM), GLD (48-336 LPM), and GCD (60-240 LPM).
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in Vacuum Pumps
ULVAC distributes vacuum pumps including dry pumps, scroll pumps, rocking piston pumps, diaphragm pumps, turbomolecular pumps, rotary vane pumps, oil diffusion pumps, mechanical booster pumps, getter and sorption pumps, and ion pumps. Turbomolecular pumps feature pivot bearing types, high/medium vacuum types, and digitally controlled magnetic levitation types. Rotary vane pumps include belt driven rotary pumps with 6.5 to 247 cfm and direct drive rotary pumps with 6 to 336 lpm.